化学蒸汽免职(CVD相关论文
1 Ｉｎｔｒｏｄｕｃｔｉｏｎ Ｂｅｃａｕｓｅｏｆｔｈｅｃｏｍｂｉｎａｔｉｏｎｏｆａｎｕｍｂｅｒｏｆｆａｖｏｒａｂｌｅｐｒｏｐｅｒｔｉｅｓ,ｓｕｃｈａｓｈｉｇｈｈａｒｄｎｅｓｓ,ｈｉｇｈｃａｒｒｉｅｒｍｏｂｉｌｉｔｙａｎｄｂｒｅａｋｄｏｗｎｖｏｌｔａｇｅ,ｌａｒｇｅｂａｎｄｇａｐ ,ｌｏｗｄｉｅｌｅｃｔｒｉｃｃｏｎｓｔａｎｔ,ａｎｄｔｒａｎｓｐａｒｅｎｃｙｔｏｖｉｓｉｂｌｅｌｉｇｈｔ,ＩＲｌｉｇｈｔａｎｄｍｉｃｒｏｗａｖｅｓ,ｅｔｃ.[1] ,ｄｉａｍｏｎｄｆｉｌｍｈａｓｂｅｅｎｃｏｎｓｉｄｅｒ ａｂｌｙｐ......
