ZrMoN复合膜相关论文
采用磁控溅射法在单晶硅(100)和304不锈钢基底上沉积不同Mo含量的Zr1-xMoxN(x=0.05,0.14,0.42,0.52)复合膜,采用X射线衍射仪、纳米压痕......
采用磁控溅射法在单晶硅(100)和304不锈钢基底上沉积不同Mo含量的Zr1-xMoxN(x=0.05,0.14,0.42,0.52)复合膜,采用X射线衍射仪、纳米压痕仪(CS......