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5. Modelling of liquid metal drop deformation by intense laser pulses

Modelling of liquid metal drop deformation by intense laser pulses

来源 :LIMIS 2016——The 4th International Symposium on Laser Interac | 被引量 : 0次 | 上传用户：gkhy0907

【摘 要】

：

State of the art laser-produced plasma (LPP) sources of extreme ultraviolet radiation for lithographic applications make use of mass-limited fuel targets.

【作 者】

：

I.Yu.Vichev D.A.Kim L.S.Vinogradov M.M.Basko V.V.Ivanov V.V.Medvedev 

【机 构】

：

RnD-ISAN, Promyshlennaya str.1A, Troitsk, Moscow, 108841 Russia;Keldysh Institute of Applied Mathema

【出 处】

：

LIMIS 2016——The 4th International Symposium on Laser Interac

【发表日期】

：

2016年8期

【关键词】

：

lithography pre-pulse simulation target deformation 

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　　State of the art laser-produced plasma (LPP) sources of extreme ultraviolet radiation for lithographic applications make use of mass-limited fuel targets.

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