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5. Annealing effect of platinum incorporated nanowires created by focused ion/electron-beam induced dep

Annealing effect of platinum incorporated nanowires created by focused ion/electron-beam induced dep

来源 :International Conference on Nanoscience & Technology,China 2 | 被引量 : 0次 | 上传用户：coppi

【摘 要】

：

Focused ion-beam-mduced deposition (FIBID) and focused electron-beam-induced deposition (FEBID) are convenient and useful in nanodevice fabrication.Since the deposition is from the organometallic plat

【作 者】

：

Jingyue Fang Shiqiao Qin Xueao Zhang Dongqing Liu Fei Wang Shengli Chang 

【机 构】

：

School of Science,National University of Defense Technology,Changsha,Hunan 410073,China

【出 处】

：

International Conference on Nanoscience & Technology,China 2

【发表日期】

：

2013年3期

【关键词】

：

Electron-beam-induced deposition Ion-beam-induced deposition Annealing Current l 

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　　Focused ion-beam-mduced deposition (FIBID) and focused electron-beam-induced deposition (FEBID) are convenient and useful in nanodevice fabrication.Since the deposition is from the organometallic platinum precursor, the conductive lines directly wrote by FIB and FEB are carbon-rich materials.

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