【摘 要】
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Background,Motivation and Objective This work demonstrates a new electrode configuration for piezoelectric micromachined ultrasonic transducers(PMUTs) with increased electromechanical coupling coeffic
【机 构】
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University of California,Davis,Davis,CA,USA
论文部分内容阅读
Background,Motivation and Objective This work demonstrates a new electrode configuration for piezoelectric micromachined ultrasonic transducers(PMUTs) with increased electromechanical coupling coefficient(kt 2).The electrodes,a center electrode surrounded by a ring electrode,are identical to those used in differential PMUTs.
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