Tailor Made of Nanocrystalline Diamond Microstructures via H2 Incorporated Ar-plasma Enhanced Chemic

来源 :The 8th Asian-European International Conference on Plasma Su | 被引量 : 0次 | 上传用户：muzhe8835

【作者】

：

I-Nan Lin Huang-Chin Chen Chuang-Shern Wang Yun-Rue Lee Chi-Young Lee

【机构】

：

Department of Physics,Tamkang University,Tamsui 251,Taiwan

【出处】

：

The 8th Asian-European International Conference on Plasma Su

【发表日期】

：

2011年1期

【关键词】

：

Granular structure of diamond Optical emission spectroscopy Microwave plasma enh

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Tailor Made of Nanocrystalline Diamond Microstructures via H2 Incorporated Ar-plasma Enhanced Chemic

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