Single Chip Integration of Multi Walled Carbon Nanotubes Thin Film Humidity Sensor

来源 :International Conference on Nanoscience & Technology,China 2 | 被引量 : 0次 | 上传用户：wsgray

【摘要】

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【作者】

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Tuo Li Xiaowei Liu Changchun Dong

【机构】

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Department of Microelectronics,Harbin Institute of Technology,Harbin,Heilongjiang,China;Key Laborato

【出处】

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International Conference on Nanoscience & Technology,China 2

【发表日期】

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2013年3期

【关键词】

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multi walled carbon nanotube humidity sensor integration heating

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　　Miniaturization and integration of humidity sensors are strongly demanded for humidity sensing and monitoring in industrial and environmental applications.As carbon nanotubes materials have proven greatly potential for gas and humidity sensing and suitable for micro/nano devices, one humidity sensor based on multi walled carbon nanotubes (MWNTs) thin film integrated with its ASIC on chip is developed in this paper.

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Single Chip Integration of Multi Walled Carbon Nanotubes Thin Film Humidity Sensor

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