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5. Transparency Conducting AZO Films by Using DC Sputtering and RF Sputtering

Transparency Conducting AZO Films by Using DC Sputtering and RF Sputtering

来源 :The 26th International Conference on Low Temperature Physics | 被引量 : 0次 | 上传用户：phpzen

【作 者】

：

N.F.Shih B.R.Chen B.C.Yao H.Z.Chen C.H.Lin 

【机 构】

：

Department of Electronic Engineering,Hsiuping Institute of Technology,Taichung City,Taiwan

【出 处】

：

The 26th International Conference on Low Temperature Physics

【发表日期】

：

2011年1期

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