Performance improvement of phase-change memory cell with atomic layer deposition titanium dioxide bu

来源 :第一届国际ALD应用大会暨第二届中国ALD学术交流会 | 被引量 : 0次 | 上传用户：ghostbyte

【作者】

：

Sannian Song Zhitang Song Dongning Yao Yegang Lv Yifeng Gu Wei Xi Songlin Feng

【机构】

：

State Key Laboratory of Functional Materials for Informatics,Shanghai Institute of Micro-system and

【出处】

：

第一届国际ALD应用大会暨第二届中国ALD学术交流会

【发表日期】

：

2012年4期

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