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5. Measurement of metastable N2(A3Πu +) density in inductively-coupled nitrogen plasma by cavity ringdo

Measurement of metastable N2(A3Πu +) density in inductively-coupled nitrogen plasma by cavity ringdo

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：weiwei00414

【摘 要】

：

We developed a system of cavity ringdown absorption spectroscopy to apply it to the measurement of N2(A3Πu+) density in an inductively-coupled nitrogen plasma source.

【作 者】

：

Koichi Sasaki 

【机 构】

：

Division of Quantum Science and Engineering, Hokkaido University, Sapporo 060-8628, Japan

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

N2(A3Πu+) Density Cavity Ringdown Spectroscopy Diode Laser Silicon Nitriding 

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We developed a system of cavity ringdown absorption spectroscopy to apply it to the measurement of N2(A3Πu+) density in an inductively-coupled nitrogen plasma source.

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