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The demand for higher frequency applications is growing and a solid-state source for THz frequencies is needed.We compare experimentally demonstrated results of resonant tunnelling diode and planar Gunn diodes for terahertz technology.The highest power demonstrated for W-band RTD oscillators at 75.2 GHz with-0.2 dBm(0.96 mW)and at 300GHz for submicron planar Gunn with-16dBm(28μW)are compared as the potential solid-state source for Terahertz applications.