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5. The Investigation of Cr-Al-Si-N Films Deposited on Cemented Carbide Substrates for High-speed Dry Cu

The Investigation of Cr-Al-Si-N Films Deposited on Cemented Carbide Substrates for High-speed Dry Cu

来源 :The 8th Asian-European International Conference on Plasma Su | 被引量 : 0次 | 上传用户：cxksky

【作 者】

：

Shihong Zhang Mingxi Li Lei Wang Fei Cai 

【机 构】

：

School of Materials Science and Engineering,Anhui University of Technology,Maanshan 243002,China

【出 处】

：

The 8th Asian-European International Conference on Plasma Su

【发表日期】

：

2011年1期

【关键词】

：

AIP Structures Mechanical properties Cr-Al-Si-N films 

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