针对光源连续扫描位置敏感器(PSD)时,PSD产生的动态响应误差随扫描速度的不同而发生变化的问题,基于二维四边型PSD,建立光源扫描照射下PSD动态响应模型,仿真分析得到了不同光源扫描速度下,PSD动态响应误差的分布,光源扫描速度越快,PSD动态响应误差越大。最后对影响动态响应误差分布的两个主要因素进行了分析。建立的二维PSD动态响应模型及仿真结果为PSD器件的实际工程应用提供了一个有效的依据。 In order to solve the problem that the dynamic response error of PSD varies with the scanning speed when scanning the position sensor (PSD) continuously, the PSD dynamic response model under the scanning of light source is established based on the two-dimensional quadrilateral PSD. The simulation results show that Under the different light source scanning speed, the distribution of PSD dynamic response error, the faster the light source scanning speed, the greater the PSD dynamic response error. Finally, the two main factors affecting the error distribution of dynamic response are analyzed. The established two-dimensional PSD dynamic response model and simulation results provide an effective basis for the practical engineering application of PSD devices.