论文部分内容阅读
Submicron Pattern of aGold Thin Film by Thermal Nanoimprint and Wet-Etching with a Photo-Crosslinkab
【机 构】
：
IMRAM, Tohoku Univ., 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan;Tokyo Institute of Tech
【出 处】
：
3rd International Symposium on Integrated Molecular/Material
【发表日期】
：
2008年1期
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