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Fabrication of micro energy director on PMMA substrate for micro ultrasonic bonding
【机 构】
：
Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian,116024
【出 处】
：
中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of th
【发表日期】
：
2008年12期
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