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5. Study on plasma uniformity by using 2D real time measurement method in Ar/He inductively coupled pla

Study on plasma uniformity by using 2D real time measurement method in Ar/He inductively coupled pla

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：sznzhu

【摘 要】

：

Recently,measurement method of two dimensional (2D) spatial distribution of plasma parameters based on the floating harmonic method was developed by Chung and co-workers [1,2].

【作 者】

：

Young-Cheol Kim Hyo-Chang Lee Chin-Wook Chung 

【机 构】

：

Department of Electrical Engineering, Hanyang University,17 Haengdang-dong, Seongdong-gu, Seoul, 133

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

plasma uniformity inductively coupled plasma real time monitoring plasma density 

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Recently,measurement method of two dimensional (2D) spatial distribution of plasma parameters based on the floating harmonic method was developed by Chung and co-workers [1,2].

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