Rigorous 3D Photolithography Simulation

来源 :第八届工业与应用数学国际大会 | 被引量 : 0次 | 上传用户：cygggg

【摘要】

：

　　The complexity of modern photolithography makes extensive simulations indispensable.In this talk,based on the parallel adaptive finite element toolbox PHG,a

【作者】

：

CuiTao[1]ChenZhiming[2]

【机构】

：

ICMSEC,AMSS,CAS

【出处】

：

第八届工业与应用数学国际大会

【发表日期】

：

2015年期

下载到本地 , 更方便阅读

下载此文赞助VIP

声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架

论文部分内容阅读

　　The complexity of modern photolithography makes extensive simulations indispensable.In this talk,based on the parallel adaptive finite element toolbox PHG,an extremely fast time-harmonic finite element solver was developed to simulation of light scattering from DUV/EUV masks.

其他文献

Optimization of Nested Latin Hypercube Designs

　　This paper introduces a multi-layer enhanced stochastic evolutionary algorithm to improve the space-filling property of nested Latin hypercube designs(NLHDs

会议

Quantifying Uncertainties on Excursion Sets under A Gaussian Random Field Prior

　　The problem of estimating and quantifying uncertainties for highly non-linear quantities of a deterministic function under a limited evaluation bud get is a

会议

Asymptotic Limits of Discrete Structures

　　I will provide an overview of this exciting area of study,put the whole area in perspective,and elaborate on its broad connections to other areas of mathema

会议

A Statistical perspective of UQ:design,modeling and computations

　　This minisymposium consists of three sessions.Each co-organizer will organize one session.They will address the three aspects of the title: design,modeling,

会议

A Multilevel Radial-Basis-Function Method for Computer Experiments

　　In this work we propose a multilevel collocation method for multifidelity computer experiments using the radial basis functions as the interpolator.Theoreti

会议

KAM for Equilibrium Solutions of the Frenkel-Kontorova Models on Quasiperiodic Media

　　We consider Frenkel-Kontorova models corresponding to onedimensional quasi-crystals.According to the arithmetic properties of the rotation numbers,we develo

会议

Coarse Graining,Dynamic Renormalization and the Kinetic Theory of Shock Clustering

　　In this talk,I will discuss simulations of the benchmark problem arising from shock clustering.The computation of coarsely self-similar flow turbulence can

会议

Asymptotic limits of discrete structures

　　This mini-symposium will center on asymptotic limits of various discrete structures and their associated phase transitions from a statistical mechanics pers

会议

Asympotic Structure of Constrained Directed Random Graphs

　　We study the asymptotics of large directed graphs,constrained to have certain densities of edges and/or outward p-stars.Our models are close cousins of expo

会议

Homogenization of quasi-static Maxwell's equations

　　This paper studies the homogenization of quasi-static and nonlinear Maxwell's equations in grain-oriented(GO)silicon steel laminations.Based on the magnetic

会议

Rigorous 3D Photolithography Simulation

与本文相关的学术论文