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5. Investigation of Electrical Properties of Thermal CVD Graphene

Investigation of Electrical Properties of Thermal CVD Graphene

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：yty3224

【摘 要】

：

This study examined the synthesis of large area graphene and the change of its characteristics depending on the ratio of CH4/H2 by using the thermal CVD methods and performed the experiments to contro

【作 者】

：

Seung-Hwan Lee Min-Sup Choi Won-Jong Yoo 

【机 构】

：

SKKU Advanced Institute of Nano-Technology(SAINT), Department of Nano Science and Technology,Sungkyu

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

CVD Graphene Graphene Field Effect Transistor P+&N+ doped graphene 

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This study examined the synthesis of large area graphene and the change of its characteristics depending on the ratio of CH4/H2 by using the thermal CVD methods and performed the experiments to control the electron-hole conduction and Dirac-point of graphene by using chemical doping methods.

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