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5. Development of a 5kV high-frequency pulsed power supply for surface processing

Development of a 5kV high-frequency pulsed power supply for surface processing

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：haizibooks

【摘 要】

：

Power supply is a major factor in surface processing,and in this paper,a new type of pulsed power supply utilizing IGBT solid state switches is designed.

【作 者】

：

Jingwei Shi Zongtao Zhu ChunZhi Gong Xiubo Tian Shiqin Yang 

【机 构】

：

State Key Laboratory of Advanced Welding and Joining,Harbin Institute of Technology, Harbin, 150001,

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

Surface Processing Pulsed Power Supply Solid State Switches Protection Circuit 

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Power supply is a major factor in surface processing,and in this paper,a new type of pulsed power supply utilizing IGBT solid state switches is designed.

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