【摘 要】
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Background, Motivation and Objective Large piezoelectricity in ScAlN film has received increasing interest in recent years. Elastic constant tensors of ScAlN films are required to design the SAW and B
【机 构】
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Faculty of Science and Engineering, Waseda University, Tokyo, Japan;Nagoya Institute of Technology,
论文部分内容阅读
Background, Motivation and Objective Large piezoelectricity in ScAlN film has received increasing interest in recent years. Elastic constant tensors of ScAlN films are required to design the SAW and BAW devices. Last year, Tanaka′s group presented the full tensors of elastic, dielectric, and piezoelectric constants of the ScAlN films (x=0.4) where the electromechanical coupling kt reaches maximum [1].
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