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Design and Assessment of a Piezo-actuated 3-DOF Flexible Nanopositioner with Large Stroke
【机 构】
：
Department of Mechatronic Engineering,Guangdong University of Technology,Guangzhou,China
【出 处】
：
第6届纳米操纵、制造与测量国际会议( the International Conference IEEE 3M-NANO
【发表日期】
：
2016年5期
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