论文部分内容阅读
After the developed for few decades, MEMS technology in China is going to mature, which, at the same time, combined with the interest from the main IC manufacturers who are attracted by the increasing requirements in the MEMS market. Definitely, it is the time to commercialize the MEMS in China. This report just focuses on the possible problems in the procedure of MEMS R&D, production and marketing in China mainland, and presents the authors resolutions.