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Scanning probe microscopy (SPM) had been recognized as an imaging technology with an atomic resolution since scanning tunneling microscopy was first introduced in 1981.Since then its capabilities have been expanded due to invention of an atomic force microscope in 1986, a near-field scanning optical microscope (or a scanning near-field optical microscope) in 1988.This novel technology is now strengthened with more than 30 SPM-based methodologies.Hence SPM and the related methodologies now cover the wide areas such as microscopy, spectroscopy, nanofabrication and so on.Even though SPM is plays an essential role in nanotechnology, it shows a disadvantage in measuring an absolute measurand for metrology.