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In order to discuss the nano SiO2 and nano/micron SiO2 composite poison effect and oxidative damage effect on A549 cells.The nano, micro, nano/micron SiO2 composite according to different role (0 、 6.25、 12.5、 25、 50、 100μg/ml) at 24 hours.The inhibition rate to A549 cells were observed by CCK-8 method, DCFH-DA fluorescent marker detection cell reactive oxygen species(ROS)level, trace enzyme standard method to determine the cell LDH changes.The results show that compared with the control, alone and compound exposed group of exposure to cell inhibition rate are rising (p < 0.05), and the composite exposure group always higher than exposure group, low concentration alone when the inhibition rate to the cells of SiO2 micron nano SiO2, with higher than the increase of concentration, nano group higher than micron group (p < 0.05);And negative compared with controls, the exposure to elevated levels of ROS, nano SiO2 group with concentration than micron SiO2 group, and composite SiO2 exposure group with concentration of exposure is higher than alone;Compared with the control, poisonous group LDH leels, exist doses-effect relationship, with concentration nano group higher than micron group,compound exposed group alone than exposure group (p < 0.05).The results show that particle can cause A549 cells SiO2 inhibition rate rise, active oxygen levels rise and cell membrane injury, and compound exposed group is better than single exposure group, with concentration nano SiO2 group higher than micron group, explain oxidative damage may be the nano SiO2 cell apoptosis a way.