In this work,we report on the formation and characterization of monomode KTiOPO4 waveguide at 1529 nm by 6.0 MeV C3+ion implantation with the dose of 2×1015 ions/cm2 and Rb+-K+ion exchange,respectively.The relative intensity of light as a function of effective refractive index of TM modes at 633nm and 1539nm for KTiOPO4 waveguide formed by two different methods were compared with the prism coupling technique.The refractive index(nz)profile for the ion implanted waveguide was reconstructed by reflectivity calculation method,and one for the ion exchanged waveguide was by inverse Wentzel-Kramers-Brillouin,respectively.The nuclear energy loss versus penetration depth of the C3+ions implantation into KTiOPO4 was simulated using the Stopping Range of Ions in Matter software.The Rutherford Backscattering Spectrometry spectra of KTiOPO4 waveguide was analyzed after exchanged.The results showed that monomode waveguide at 1539 nm can be formed by ion implantation and Rb+-K+ion exchange,respectively.