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5. Design and Fabrication of a Novel PZT Films Based Piezoelectric Micromachined Ultrasonic Transducer

Design and Fabrication of a Novel PZT Films Based Piezoelectric Micromachined Ultrasonic Transducer

来源 :2008 IEEE International Ultrasonics Symposium(IUS)(2008 IEEE | 被引量 : 0次 | 上传用户：djsfhkjthrekl

【作 者】

：

Junhong Li Chenghao Wang 

【机 构】

：

Institute of Acoustics, Chinese Academy of Science, China

【出 处】

：

2008 IEEE International Ultrasonics Symposium(IUS)(2008 IEEE

【发表日期】

：

2008年1期

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