Glass chip is an important and commonly used materials for microchips due to its excellent properties.Conventional method for the galss chips is based on UV lithography,which requires specialliazed equipments and represnents a barrier to the mass production of glass microchips[1].Campbell et al.proposed the direct printing microstructures onto glass by agarose stamps soaked in HF etching soluton[2].Hanners developed a method that combines PDMS microcontact printing and wet etching[3].However,compared with chemical etching,electrochemical etching has higher accuracy and controllability.Our group has developed electrochemical wet stamping technique,to electrochemical etch silicon or metal surface using agarose gel soft stamps[4].Here,we reported that by using polycarylamide hydrogel (PAG) as electrochemical soft stamps,galss chips could be fabricated in mass with cost as almost one fifth of that of UV lithography.The apparatus and process of electrochemical soft stamping was shown in figure 1.Electric field was applied between PAG soft stamp and the metal film waiting for fabricated.PAG soft stamp was cast on silicon/photoresist mold which was fabricated by nanoimprint,the dimension of smallest structure is around 300 nm.As shown in the figure 2,the Youngs modulus of PAG stamps were obtained by fitting the approaching curve with Hertz model based on the AFM force-distance curves of the PAG stamps.The effect of the Acr and bis concentration to stamp modulus were discussed as a basis to explore the stamp stress and strain under pressure by using ANSYS simulation,the results show that the Youngs modulus of PAG gel is 4.46 MPa,which is around 2 orders of magnitude higher than that of agarose gel.After optimized the processes and parameters,such as etching potential,pressure,time,pattern shape and the wetability of the surface of the fabricating metal,microgroove structures with high quality have been fabricated (Fig 3).And the fabbrication cost of glass chips is about 33.4 RMB per chip ( yield > 50),while that of UV lithography is 148RMB (Fig 4).