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  5. Studies on the Amorphous Thin Film Characteristics of A Zr-Based Fabricated by Magnetron Sputtering

Studies on the Amorphous Thin Film Characteristics of A Zr-Based Fabricated by Magnetron Sputtering

来源 :第七届亚澳复合材料会议 | 被引量 : 0次 | 上传用户：zhangkl
【摘 要】
：
The microstmcture and performance of Zr-Base thin films coated on the WC were systematically investigated by means of AFM, TEM, nano indentation and scratch test in this study.Zr-Base Metallic Glass t
【作 者】
：
Chi-Wen Chu C.H Lin Chia-Hsun Huang 
【机 构】
：
Meatal Industries Research &Development Centre,Kaoshiung,Taiwan
【出 处】
：
第七届亚澳复合材料会议
【发表日期】
：
2010年4期
【关键词】
：
PVD Coating Ion Beam Hard films Metallic Glass Thin Films 
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　　The microstmcture and performance of Zr-Base thin films coated on the WC were systematically investigated by means of AFM, TEM, nano indentation and scratch test in this study.Zr-Base Metallic Glass thin films is a prominent material for protective coatings due to its excellent oxidation resistance and adhesive capability.The results of properties evaluation for these coatings on the tungsten drill samples revealed that the doping of W accompanied with pursing C2H2 gas on the Zr-Base Thin Films coating effectively increases the hardness of from 8GPa to 25 GPa and decreases the frictional coefficient from 0.35 to 0.26.In addition, when these three thin films were.
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