【摘 要】
：
In recent years, WOx electrochromic thin films by glancing angle deposition (GLAD) have been demonstrated to be preponderant due to the favorable diffusion of ions.The WO3-based thin films are deposit
【机 构】
：
Shanghai Institute of Optics and Fine Mechanics, CAS, China
【出 处】
：
The 9th International Conference on Thin Film Physics and Ap
论文部分内容阅读
In recent years, WOx electrochromic thin films by glancing angle deposition (GLAD) have been demonstrated to be preponderant due to the favorable diffusion of ions.The WO3-based thin films are deposited with GLAD technique in the electron beam deposition system in this paper.
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