本文基于传输线周期性加载可变电容理论,设计了一种X波段的铁电薄膜移相器。测试结果表明,随着偏压的增加,移相度增大、插损减小。在32伏的直流偏压下,X波段最大移相度为140°,最大插损为10dB,回波损耗优于-10dB。 In this paper, based on the theory of periodically loading variable capacitance of transmission line, an X-band ferroelectric thin film phase shifter is designed. The test results show that as the bias voltage increases, the phase shift increases and the insertion loss decreases. Under DC bias of 32 V, the maximum phase shift of the X-band is 140 °, the maximum insertion loss is 10 dB, and the return loss is better than -10 dB.