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5. Atmospheric pressure microplasma and its applications in nanofabrications

Atmospheric pressure microplasma and its applications in nanofabrications

来源 :The 6th International Symposium on Plasma Nanosciences-Progr | 被引量 : 0次 | 上传用户：maciqian

【作 者】

：

Xiaoxia Zhong 

【机 构】

：

State Key Laboratory of Advanced Optical Communication Systems and Networks,Key Laboratory for Laser

【出 处】

：

The 6th International Symposium on Plasma Nanosciences-Progr

【发表日期】

：

2015年3期

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