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5. Ellipsometric Analysis on Optical Properities of Hydrogen-Free DLC thin Films Prepared by Pulse Vacu

Ellipsometric Analysis on Optical Properities of Hydrogen-Free DLC thin Films Prepared by Pulse Vacu

来源 :The 11th International Workshop on Plasma-Based Ion Implanta | 被引量 : 0次 | 上传用户：haitian001

【作 者】

：

F.Y.xia L.X.Hang Y.X.Xi 

【机 构】

：

Shaanxi Province Thin Film Technology and Optical Test Open Key Laboratory, Xi'an Technological Uni

【出 处】

：

The 11th International Workshop on Plasma-Based Ion Implanta

【发表日期】

：

2011年3期

【关键词】

：

hydrogen-free DLC film pulse vacuum arc deposition structure modeling ellisometr 

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