【摘 要】
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Ion cleaning technology has been widely used before coating deposition for its obviously contribution to improve coating properties. High energy cleaning source of Ar+ ions were produced by n merous e
【机 构】
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School of Material Science and Engineering, Anhui University of Technology, Ma''''anshan 243002,
【出 处】
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第十一届全国表面工程大会暨第八届全国青年表面工程学术会议
论文部分内容阅读
Ion cleaning technology has been widely used before coating deposition for its obviously contribution to improve coating properties. High energy cleaning source of Ar+ ions were produced by n merous electron to excite argon in the vacuum furnace chamber with low bias voltage, which is different from the traditional plasma cleaning with high bias voltage (bombarding ions are mainly Ar+ and Ti+). The roughness of samples surface was systematically detected after utilizing different ion cleaning technology before ion plating. Then the AlCrN coatings of corresponding ion cleaning technology produced have been investigated microstructure, surface morphology, hardness, adhesion strength and friction and wear properties. The results showed low bias voltage with high energy Ar+ ions can clean surface of workpieces more effectively and significantly improve the adhesion of coatings reaching to 48.7N which is better than 35.6N of the coating produced with traditional ion cleaning technology.
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