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5. Comparative studies on the mechanical properties of CrZrN, CrZrSiN, and CrZrSiN/AlN coatings

Comparative studies on the mechanical properties of CrZrN, CrZrSiN, and CrZrSiN/AlN coatings

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：h9501oney

【摘 要】

：

The monolithic CrZrN coatings showed quite unique characteristics in that they have not only much improved mechanical properties,but also a low surface roughness.

【作 者】

：

BomSok Kim JaeYong Kim Jong-Ho Oh 

【机 构】

：

Center for Surface Technology and Applications , Korea Aerospace University, HangGongDae-Gil 100,Deo

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

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The monolithic CrZrN coatings showed quite unique characteristics in that they have not only much improved mechanical properties,but also a low surface roughness.

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