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在工业生产中,人们对温度传感器超小型化的要求越来越迫切,而薄膜传感器的出现满足这一要求。薄膜温度传感器由于其优异的性能,在工业生产中越来越得到广泛应用。本文介绍了薄膜温度传感器的特点、种类、应用,着重介绍了薄膜热敏电阻传感器测温机理、膜系、影响其测温精度的主要因素及薄膜热敏电阻主要制备工艺、设备等,并探讨了薄膜热敏电阻的标定方法,最后论述了热敏电阻传感功能薄膜的国内外发展现状及其目前制备热敏电阻传感功能薄膜需要解决的关键技术问题。
In industrial production, people are more and more urgent to the miniaturization of the temperature sensor, and the emergence of thin film sensors to meet this requirement. Thin-film temperature sensors are gaining popularity in industrial production because of their excellent properties. This paper introduces the characteristics, types and applications of the thin-film temperature sensor. It mainly introduces the temperature measurement mechanism of the thin-film thermistor sensor, the main factors affecting the precision of the thin-film thermistor sensor and the main preparation technology and equipment of the thin film thermistor. Finally, the development status of thermistor sensing functional films at home and abroad and the key technical problems to be solved in the current preparation of thermosensitive sensing thin films are discussed.