Anodic oxidation of reaction-sintered silicon carbide by ultra-pure water under high-frequency-squar

来源 :The 6th International Conference on Nanoscience and Technolo | 被引量 : 0次 | 上传用户:enginery_puppet
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  Reaction sintered silicon carbide(RS-SiC)is a promising material which has been applied in many industrial fields and anodic oxidation is an effective method for the process of RS-SiC by combination with abrasive polishing.
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