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采用多弧离子镀工艺,以Al Ti合金靶和Zr单质靶为组合,通过改变AlTi靶电流,在氮化硅陶瓷刀具表面制备了一组(Ti,Al,Zr)N涂层。分别采用扫描电镜(SEM)、纳米压痕和纳米划痕研究AlTi靶电流对(Ti,Al,Zr)N涂层形貌和结构、硬度和涂层/氮化硅陶瓷刀具基体结合力的影响。实验结果表明,随着涂层沉积过程中Al Ti靶电流的增加,(Ti,Al,Zr)N涂层表面大颗粒数量先增加后减少;涂层厚度增加;涂层硬度和膜基结合力先升高后降低。最后,对涂层氮化硅陶瓷刀具进行高速干车削铸铁实验,研究Al Ti靶电流对(Ti,Al,Zr)N涂层氮化硅陶瓷刀具切削性能、磨损机理和切削寿命的影响,评估涂层刀具切削性能。
A set of (Ti, Al, Zr) N coatings were prepared on the surface of Si3N4 ceramic tool by changing the target current of AlTi by using multi-arc ion plating technology. The effects of AlTi target current on the morphology, structure and hardness of (Ti, Al, Zr) N coatings and their bonding strength were studied by scanning electron microscopy (SEM), nanoindentation and nano- . The experimental results show that with the increase of Al Ti target current during deposition, the amount of large particles on the surface of (Ti, Al, Zr) N coatings first increases and then decreases; the thickness of the coating increases; the hardness of the coating and the film- First increase and then decrease. Finally, the high speed dry cast iron test was carried out on the coated silicon nitride ceramic tool to study the effect of Al Ti target current on the cutting performance, wear mechanism and cutting life of (Ti, Al, Zr) N coated silicon nitride ceramic tool. Coating tool cutting performance.