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本文详细研究了磁控溅射制备Ti-Si-N纳米超硬复合膜中,Si含量与所制薄膜材料的显微结构、力学性能之间的关系.指出了纳米复合薄膜材料Ti-Si-N的强化机理.在此基础上,通过分别掺杂金属Ni,Al等元素,研究了掺杂元素对Ti-Si-N薄膜材料显微结构、力学性能的影响.
超硬纳米复合薄膜材料及其增韧机理的研究
【摘 要】
：
本文详细研究了磁控溅射制备Ti-Si-N纳米超硬复合膜中,Si含量与所制薄膜材料的显微结构、力学性能之间的关系.指出了纳米复合薄膜材料Ti-Si-N的强化机理.在此基础上,通过分别掺杂金属Ni,Al等元素,研究了掺杂元素对Ti-Si-N薄膜材料显微结构、力学性能的影响.
【机 构】
：
重庆大学材料科学与工程学院
【出 处】
：
2014中国功能材料科技与产业高层论坛
【发表日期】
：
2014年2期
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