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Super-hydrophobic surfaces with water contact angle (WCA) higher than 150° generated a lot of interest both in academic and in industry because of their self-cleaning propertiesfunctionality.Techniques to produce hydrophobic and super-hydrophobic surfaces can be broadly classified into two categories: a) making a rough surface from a low surface energy material;b) modifying a rough surface with a material of low surface energy.The SiO2 was prepared at room temperature (25℃) with the molar ratio of TEOS∶C2H5OH∶H2Owas kept constant at 1∶4∶1, and ammonia as a catalyst.The WCA (water contact angle) of obtained dried SiO2 powders can reach to 121.7°, and through modified by TMCS (trimethylchlorosilane)can further increase to as high as 162° and water sliding angle (WSA) was 2°.The results of FTIR spectra and SEM indicate that hydrophobic properties of the powders modified by TMCS should be originated the synergistic effect from substitution of the hydrophilicgroups of SiO2 by the one of lower surface energy and the formation of nano/micron binary structure (i.e.a micron-scale diameter and a nano-scale surface roughness.).