Detection for spring constant of microcantilevers in atomic force microscopy based on frequency meas

来源 :中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of th | 被引量 : 0次 | 上传用户:tian314714
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
  Micro cantilevers in atomic force microscopy are important force sensors in nano research,and the spring constant is one of the most important parameters of the cantilevers.Normal testing methods are not suitable for the spring constant detecting of micro cantilevers according to the strict scale of the cantilevers,and new methods are needed to the study of micro cantilevers.A new method for detecting of spring constant of micro cantilevers based on combining the numerical simulation and frequency measurements is presented in this paper.The new method involves four steps,the first step is developing the vibration model of the micro cantilever studied immersed in air and determine the fluid parameters in the model during dynamic tests in atomic force microscopy presented in this paper; the second step is analyzing the vibration behavior of the corresponding cantilevers with the same geometry but different youngs modulus.The third step is measuring the natural frequencies of the micro cantilevers and comparing the experimental results with the numerical results to determine the youngs modulus of the cantilever.The last step is conduct the youngs modulus to the cantilever FEA model for determination of its spring constant.Experiments on a NSC cantilever have been done to validate the method presented in this paper.
其他文献
Aiming at the abuse of precipitation complexity was eliminated in analyzing water resources development trend formerly which amplifies the difficulty of preventing drought and watedogging effectively.
Remote sensing (RS) technique is now widely applied in many fields,evapotranspiration (ET) retrieval is among them.This paper introduces some main methodologies widely used globally.The methods can be
A simplified grid-based land surface model is proposed to characterize the impact of land use and vegetation types on land surface processes over large river basins.On the basis of land cover data in
According to regional complex precipitation process is hard to accurately predict, and the disadvantages of effective management of water resources can not be achieved.Farm Qindeli in Jiansanjiang bra
On the basis of analyzing the characteristics of epikarst "dualistic" water resource in Karst Region, the author combines the set pair analysis method with entropy weight method to establish entropy w
Flooding is one of the major natural disasters.Projected rapid land use change, over the coming decades, when coupled with climate change could potentially lead to increased risk of flooding in urban
会议
会议
会议
会议
会议