As one of the laser host materials,Nd:YVO4 has been paid more and more attention due to its features,i.e.,low lasing threshold,large absorption coefficient and high slope efficiency,which are suitable for diode laser-pumped solid-state laser.In integrated optical devices,a waveguide structure is necessary which can enhance the conversion efficiency and hence minimize the light source,thus,the possibility of achieving Nd∶YVO4 thin films with waveguide structure will widen their field of application in integrated optics.In this article,we present the study of the structural and the optical properties of Nd∶YVO4 waveguide thin films grown by PLD on Si/SiO2 substrates as a function of the growth conditions.