MgB2 superconducting films with the thickness of 10nm to 8μm have been fabricated on SiC substrates by hybrid physical-chemical vapor deposition (HPCVD) method.It is the first time that Tc and Jc of MgB2 films are studied in this range.It's found that with the increasing of thickness, Tc elevates at first and then keeps roughly stable except for some slight fluctuations, while Jc (5K, 0T) experiences a sharp increase followed by a relatively slow fall.The maximum Tc=41.4K and the maximum Jc (5K, 0T) =2.3× 108Acm-2 are both obtained for 100 nm films, which is the experimental evidence for preparing high-quality MgB2 films byHPCVD method.This work may provide guidance on choosing the suitable thickness when preparing MgB2 films.Meanwhile, the thickness, from 10nm to 8μm, covers ultrathin films, thin films and thick films, so the study on them brings a comprehensive understanding of MgB2 films on a wide scale.