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Synthesis of Nanoscale Structures in Silicon at A Short-Pulse Implantation of Carbon Ions
【作 者】
:
【机 构】
:
Institute of High-Technology Physics, National Research Tomsk Polytechnic University, Tomsk, Russian
【出 处】
:
The 17th International Conference on Surface Modification of
【发表日期】
:
2011年3期
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