2. 您的位置
3. 首页
4. 会议论文
5. Growth Mode in Plasma Enhanced ALD of Al2O3 on Different Interfacial Species of pre-treated Plastic

Growth Mode in Plasma Enhanced ALD of Al2O3 on Different Interfacial Species of pre-treated Plastic

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：wendiii

【摘 要】

：

Atomic layer deposition is used in applications where inorganic or organic materials layers with uniform thickness down to the nanometer range are required.

【作 者】

：

Wenwen Lei Xingcun Li Qiang Chen 

【机 构】

：

Laboratory of Plasma Physics and Materials, Beijing institute of Graphic Communication, Daxing 10260

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

ALD growth mode interfacial species polyethylene terephthalate OTR 

下载到本地 , 更方便阅读

下载此文 赞助VIP

声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架

论文部分内容阅读

Atomic layer deposition is used in applications where inorganic or organic materials layers with uniform thickness down to the nanometer range are required.

其他文献

Improvement of On-Off Current Ratio in Pentacene-based TFT using Asymmetric Metal Source/Drain

Organic thin film transistors (OTFTs) have been recently exploited in the applications requiring low power dissipation,such as display driver logic circuits [1].

会议

OTFTPentaceneAsymmetric S/D

Effect of Crystal Quality on Fermi-level pinning in Metal-Pentacene Junction

Fermi-level pinning phenomenon,which provides undesirable Schottky barrier height (BH) without regard to metal workfunction,has been previously confirmed at metal-organic (M/O) junction.

会议

PentaceneM/OFermi-level pinning

Ion beam scanning method on polyimide layers for large-size liquid crystal displays

In this work,ion beam scanning method on conventional polyimide (PI) layers for large-size liquid crystal displays (LCDs) is proposed.

会议

Liquid CrystalIon BeamPolyimidePretilt AngleScanning Method

Poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) as a buffer layer to improve brittleness of

In the last two decades,indium-tin-oxide (ITO) is most widely used for transparent electrode because of its high optical transmittance in visible light and low electrical resistance.

会议

Flexible ElectronicsFlexible SubstrateITOPEDOT:PSS

Fabrication and Characterization of Blue (UGH2,TCTA): FCNIr(pic) PhOLEDs

Aryl silane,especially,p-bis(triphenylsilyl)benzene [UGH2] has been used to study blue phosphorescent organic light-emitting diodes [PhOLEDs] because of high triplet energy.

会议

UGH2 FCNIr(pic)Exciton ConfinementBlue Phosphorescence

Vertical Liquid Crystal Orientation on Amophous Aluminum Oxide surfaces Depending on Bond-Breaking V

We studied the characteristics of the amorphous aluminum oxide (a-Al2O3) inorganic film deposited by radio-frequency magnetron sputtering as an alternative alignment layer for liquid crystal display (

会议

Aluminum oxideIon Beam (IB) irradiationliquid crystals (LCs)vertical alignmen

Characteristics of ultra-thin shadow mask PDP in different xenon-neon mixtures

The conception of ultra-thin shadow mask PDP is proposed on the basis of existing shadow mask PDP technology.Compared with the traditional shadow mask PDP, the ultra-thin shadow mask PDP uses the ultr

会议

ultra-thin shadow mask PDPfiring voltagedischarge delaydischarge efficiency

Highly efficient grating coupler between optical fiber and silicon-on-insulator waveguide

Abstract:Integrated optical waveguides structures fabricated on SOI (silicon-on-insulator) based on MEMS (micro electron mechanical system) technology are promising for large scale integration and low

会议

optical waveguidegratingcoupling

Effects of Overlapped Sustain Waveform on Panel Aging Characteristics in AC Plasma Display Panel

This paper investigates the changes in the optical and discharge characteristics during the panel aging process in ac plasma display panel when applying the overlapped sustain waveform.

会议

Plasma Display PanelOverlapped Sustain WaveformPanel Aging Process TimeDischa

Effect on Jitter Time of SMPDP with MgO CEL Sprayed in Different Substrate

To reduce the jitter time is one of key technology to achieve HDTV PDP,and it is useful way to improve the jitter response characteristic to spray the MgO crystal as the CEL (crystal emission layer) o

会议

CELjitter timesubmicron MgO crystal