【摘 要】
：
碳纳米管(Carbon Nanotube,CNT)阴极电离真空计能够克服高温热阴极引入的热出气、热辐射和光辐照等问题,有希望延伸超高/极高真空测量下限,但是碳纳米管阴极自身引入的吸放气效应成为了新的制约因素.本文基于超高/极高真空校准系统,结合质谱分析方法,实验研究了CNT 阴极电离规工作过程中的气体成分变化,同时测试了CNT 阴极电离规的宏观出气率,分析了微观气体脱附对电离规局部本底压力的影响.
【机 构】
：
兰州空间技术物理研究所 真空技术与物理重点实验室,兰州,730000
论文部分内容阅读
碳纳米管(Carbon Nanotube,CNT)阴极电离真空计能够克服高温热阴极引入的热出气、热辐射和光辐照等问题,有希望延伸超高/极高真空测量下限,但是碳纳米管阴极自身引入的吸放气效应成为了新的制约因素.本文基于超高/极高真空校准系统,结合质谱分析方法,实验研究了CNT 阴极电离规工作过程中的气体成分变化,同时测试了CNT 阴极电离规的宏观出气率,分析了微观气体脱附对电离规局部本底压力的影响.结果 表明,CNT 阴极表面独特的气体吸附-脱附特性,门极和阳极表面吸附气体受到高能电子的轰击脱附效应,均是制约电离规测量下限延伸的关键因素,通过较长时间的电流轰击和焦耳加热,可以有效降低各个电极表面的吸附气体量,将CNT 阴极电离规电极出气引入的局部干扰压力降低到2.3×10-8Pa,该研究结果为推动CNT 阴极电离规在超高/极高真空测量中的应用奠定了理论与实验基础.
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