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With fast crystallization speed, good endurance and low energy consumption, Ti-doped Sb2Te3 (TST) PCM is a promising phase change material replacing well known Ge2Sb2Te5 (GST).The uniformly distributed element and single structure of TST are responsible for the good endurance.Ti atom is believed to substitute Sb atom in TST, forming a stable phase with a low melting temperature.This deduction is supported by the p-type carrier type of TST and Ti-Te bond discovered in XPS.