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It is well known that inductively coupled plasmas have two excitation mechanisms,capacitive (E) mode and inductive (H) mode.
Mode Transition in Inductive Discharges and the Interaction of the Capacitive and Inductive Coupling
【摘 要】
：
It is well known that inductively coupled plasmas have two excitation mechanisms,capacitive (E) mode and inductive (H) mode.
【机 构】
：
PLASMANT group, Chemistry Department, University of Antwerp, Belgium
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
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