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  5. Recycling of Waste Silicon Sludge Using Separation and Purification Processes in Taiwan

Recycling of Waste Silicon Sludge Using Separation and Purification Processes in Taiwan

来源 :The 12th International Symposium on East Asian Recycling Tec | 被引量 : 0次 | 上传用户：aini412319016
【摘 要】
：
　　Recently more than 10,000 ton per month of silicon is generated as waste siliconsludge during wafer slicing for semiconductor and solar cell fabrication in
【作 者】
：
Jun-yi Wu Wei-Sheng Chen Min-Shing Tsai Juu-En Chang 
【机 构】
：
ResourcesRecyclingandManagementResearchCenter,NationalChengKungUniversity,Tainan709,Taiwan;Sustainab
【出 处】
：
The 12th International Symposium on East Asian Recycling Tec
【发表日期】
：
2013年11期
【关键词】
：
Waste silicon sludge Silicon carbide Recycling Filtration 
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　　Recently more than 10,000 ton per month of silicon is generated as waste siliconsludge during wafer slicing for semiconductor and solar cell fabrication in Taiwan.
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