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Anisotropic Nd–Fe–B thin films have been widely investigated for their potential applications in micromagnetic devices,micromechanical devices and magnetic recording media [1,2,3].In this paper,Nd–Fe–B type hard phase single layer films and nanocomposites Nd2Fe14B/(NdCe)2Fe14B/Nd2Fe14B multilayer films with Ta underlayers and coverlayers have been fabricated on Si substrates by DC sputtering.