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5. Thermodynamic Analysis of Chemical Vapor Deposition of the VN Coating

Thermodynamic Analysis of Chemical Vapor Deposition of the VN Coating

来源 :2014中国功能材料科技与产业高层论坛 | 被引量 : 0次 | 上传用户：shinobu1314

【摘 要】

：

The VN coatings were coated by chemical vapor deposition on T12 substrate using V2O5, H2 and N2 as reactants.Thermodynamic calculation and analysis of formation reaction of VN were done by thermodynam

【作 者】

：

Xian-feng Xu Hui Li 

【机 构】

：

School of Mechanical and Electronical Engineering,East China Jiaotong University, Nanchang, Jiangxi

【出 处】

：

2014中国功能材料科技与产业高层论坛

【发表日期】

：

2014年2期

【关键词】

：

Chemical vapor deposition(CVD) Thermodynamics VN coating Deposition temperature 

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　　The VN coatings were coated by chemical vapor deposition on T12 substrate using V2O5, H2 and N2 as reactants.Thermodynamic calculation and analysis of formation reaction of VN were done by thermodynamic potential function.

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